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Spectra Vision 2000-P
MKS Spectra Vision 2000-P - User Manual
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MKS Instruments
UK Ltd
V2000-P Hardw
are Manu
al
–
SP1
02006.103 M
arch 2013
1
Vision 2
000
-
P
Manual
SP102006.103
March 2013
2
Table of Contents
Main Page
Additional Installation Maintenance and Operating Instructions
4
Installation
4
Operation
4
Maintenance
4
Table of Contents
5
Health & Safety
6
Warning Symbols
7
Fuses
7
Electrical Connections
7
Installation
8
Initial Checks
8
Dimensions
9
System Components
10
Vacuum System Installation
11
RGA Vacuum Chamber Overview
11
Main Chamber Installation
12
Connecting the Backing Pump
12
Heater Jacket
12
Microvision 2 Installation
12
Electrical Installation
13
Electrical Specification
13
Equipment Rack
13
Interconnecting Cables
13
Mains Power
13
RCV Connections
14
System Box Connections
14
Connecting to the Process Tool (Vacok)
15
PC Connection
15
Operation
16
Overview
16
Start up
17
Leak Checking
18
Heating and Baking
19
System Shut down Procedure
20
Maintenance
21
Operating Pressure
21
Accessing the Orifice Disk
21
Refitting the Inlet Flange
21
Replacing the Orifice
22
Orifice Disk Tools
22
Fitting the Tool Guide
23
Removing the Orifice Disk
23
Fitting a New Orifice Disk
24
Re-Assembling the Inlet Flange
25
Vision 2000-P Electronics
27
Diaphragm Pump Maintenance
27
Turbo Pump Maintenance
27
Mass Spec Maintenance
28
Removing the Analyser
28
Re-Fitting the Analyser
28
Returning Your Equipment
29
Support Contact Numbers
29
Health and Safety Clearance Form
29
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MKS Spectra Vision 2000-P Specifications
General
Brand
MKS
Model
Spectra Vision 2000-P
Category
Measuring Instruments
Language
English
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