RGA Series Low profile fast rotation stage
3 A1355A0 – EDH0427En1010 – 04/21
magnet pitch enables higher MIM capability for those precise positioning
application needs.
Fast rotation and high acceleration enables faster completion of the process,
whether this is patterning, testing, inspection or repair of the wafer. The
response and settling times are also optimized with the structural design of
the RGA. All these enable faster throughputs.
The RGA uses non-contact motor and encoders, which not only provides the
speed, MIM and repeatability, but also improves reliability, since there is no
wear in these components. This minimizes the long term operating costs.
ESP technology, plug and play for quick and safety setups contributes to the
lower Cost of Ownership. Since stage parameters are already configured in
the XPS controller, there is very little amount or need to adjust the operating
parameters to begin using the stage quickly and more importantly, safely.
Like all MKS motorized products, each RGA is shipped with a free test
report that documents the positioning performance of each individual unit
meeting the published specifications. For higher accuracy, a mapped version
RGA150MAP is available.
Value:
In summary, the design, features and resulting performance of the RGA
ensures fast and reproducible processes. Reliability also increases due to the
non-contact components. All these reduces risk in a production setting and
also overall operating cost.
2.1 Design Details
Large diameter steel ball bearings
High torque & speed brushless DC motor with rare earth magnet
None: continuous movement
Optical index pulse, fixed at position 0°
To Next Page
Loading...
