MKS RGA Series User Manual

RGA Series Low profile fast rotation stage
A1355A0 – EDH0427En1010 – 04/21 6
3.2 Mechanical specifications
RGA150
Travel range (deg)
360 continuous
Minimum Incremental Motion, typical
(1) (3)
(mdeg)
0.01
Uni-directional repeatability, typical
(1) (3)
(mdeg)
±0.035
Bi-directional repeatability, typical
(1) (3)
(mdeg)
±0.0975
Accuracy, typical (guaranteed)
(1) (3)
(mdeg)
±4 (±8)
Mapped accuracy, guaranteed
(1) (3) (4)
(mdeg)
±1
Maximum speed
(3)
(deg/s - rpm)
1800 - 300
Maximum acceleration
See curves below
Inertia (no load) (kg.m
2
)
0.0062
Static Bearing Drag Torque
(5)
(N.m)
0.4
Dynamic Bearing Drag Torque
(5)
(N.m/deg/s)
.001
Wobble, typical (guaranteed)
(1) (2)
(µrad)
±12 (±26)
Eccentricity, typical (guaranteed)
(1)
(µm)
±0.5 (±1)
MTBF (1800 deg/s, 25% load capacity, 30% duty cycle) (h)
20,000
1)
For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at
www.newport.com
2)
To obtain arcsec units, divide µrad value by 4.8.
3)
With XPS-DRV11 Drive, maximum value is driver dependent. Contact Newport for additional information.
4)
Require ordering RGA150MAP
5)
Total Drag Torque = 0.4 + Speed/1000
At 6A peak (XPS-DRV11) – At 16A peak (external driver)
CAUTION
To reach specifications stated, stages must be fixed on a surface compliant
with section 5.3 "Mounting conditions".
3.3 Load Characteristics and Stiffness
RGA150
Cz, Normal centered load capacity (N)
50
K α , Transversal compliance (µrad/Nm)
5
Max. transverse dynamic moment (Nm)
11
Mz, Maximum torque @ 0 deg/s (Nm)
2.25
Q, Off-center load
Where
D = Cantilever distance in mm
Q ≤ Cz ÷ (1 + D/55)

MKS RGA Series Specifications

General

Brand	MKS
Model	RGA Series
Category	Measuring Instruments
Language	English