MKS RGA Series User Manual

RGA Series Low profile fast rotation stage
1 A1355A0 – EDH0427En1010 – 04/21
1.0 Introduction
This manual provides operating instructions for the rotation stage that you have
purchased in the RGA Series:
- RGA150
- RGA150MAP (RGA150 + mapping file)
This mapping file can be introduced in the controller to improve accuracy
(see §3.2 and §6.5)
Rotation stage of the RGA Series.
RECOMMENDATION
We recommend you read carefully the chapter “Connection to electronics”
before using the RGA Series rotation stage.
RGA150
Low profile
fast rotation stage

MKS RGA Series Specifications

General

Brand	MKS
Model	RGA Series
Category	Measuring Instruments
Language	English