MKS RGA Series User Manual

RGA Series Low profile fast rotation stage
A1355A0 – EDH0427En1010 – 04/21 iv
6.5 Mapping........................................................................................................ 14
7.0 Connection to Non-Newport Electronics ............................................. 15
8.0 Dimensions ............................................................................................. 16
9.0 Accessories ............................................................................................. 17
9.1 URSBK: 90° Mounting Bracket for RGA150 .............................................. 17
9.2 (M-)URS150TP: Solid Top Mounting Plate for RGA150 ........................... 18
10.0 Maintenance ........................................................................................... 19
10.1 Maintenance ................................................................................................. 19
10.2 Lubrication ................................................................................................... 19
10.3 Repair ........................................................................................................... 20
10.4 Performance verification .............................................................................. 20
Service Form ........................................................................................................ 21

MKS RGA Series Specifications

General

Brand	MKS
Model	RGA Series
Category	Measuring Instruments
Language	English