MKS Microvision2 User Manual

MKS Instruments UK Ltd
Microvision2 Hardware Manual – SP101015.102 August 2010
10
C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE
EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products
Ltd., unless special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and
safety critical and must not be substituted. Replacement parts are available from MKS Instruments UK Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and
safety performance. These must be correctly re-fitted after servicing.

MKS Microvision2 Specifications

General

Brand	MKS
Model	Microvision2
Category	Measuring Instruments
Language	English