MKS Mass-Flo 179A - Labels; Control Valve (MFC Only); Figure 7: Serial Number Label

Labels Cha
p
ter Three: Overview
38
Labels
Each 1179 unit has two serial number labels, a small one on top side and the standard, larger
label on the back side. Each label shows the serial number, the model code, the full scale flow
range, and the calibration gas.
Serial #:
Model #:
012345678
Range: 100 sccm
Gas: N2
Referenced to 0° C and 760 TORR
MKS Instruments, Inc. Made in the USA
1179A12CR1BV
1179A12CR1BV
Serial #:
Model #:
012345678
RANGE: 100 SCCM GAS: N2
Figure 7: Serial Number Label
Control Valve (MFC only)
The Control Valve is a specially constructed solenoid valve in which the armature (moving valve
mechanism) is suspended by two springs. This arrangement ensures that no friction is present
and makes precise control possible. The 1179 controller has the valve normally
closed
, the
control current is used to
lift
the armature
from
the seat, allowing a controlled flow of gas.