MKS Mass-Flo 179A - Table 13: Valve Configuration Selection Guide

How To Determine the Valve Configuration A
pp
endix D: MFC Sizin
g
Guidelines
72
2. Select the valve configuration with the C
v
value that is closest to, though larger than, the
C
v
value calculated in step 1.
The C
v
value represents the
maximum
flow rate for the unit. Choose the valve
configuration
above
your calculated C
v
value to ensure that the unit can deliver the
required flow.
Valve Configuration Selection Guide
Valve Configuration Nominal Range (N
2
) sccm Cv x 10
5
1102.44
2204.88
3 50 12.21
4 100 24.42
5 200 48.84
6 500 122.11
7 1000 244.22
8 2000 488.44
9 5000 1221.11
10 10000 1924.47
11 20000 3848.94
12 30000 5773.41
Table 13: Valve Configuration Selection Guide