Index
77
Index
A
Ambient operating temperature, 23
C
Cleanliness features, 18
Connections, 29
Connector
Edge Card, 33
Type "D", 32, 34
Control circuitry, 46
Control valve, 38
Customer support, 20
D
Design, 17
Dimensions, 27
E
Electrical, 23
Environmental requirements, 23
F
Fittings, 29
Flow path, 45
G
Gas connections, 29
Gas correction factors
description of, 35
gas mixtures, 36
pure gases, 35
reference temperature, 35
I
Interface cables, 24
Interface connectors, 24
Introduction, 17
L
Leak rate, 31
Leak testing, 50
M
Maintenance, 47
Manual organization, 19
Measurement technique, 45
Mounting, 29
N
Nupro valve, 30, 31
P
Performance specifications, 57, 58, 59
PID control, 46
Power requirements, 23
R
Reliability, 18
Repair, 48
Returns, 20, 21
S
Safety information, 1–16
Set point, 17
Setup, 26
Specifications
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