MKS Mass-Flo 2179A - Figure 11: Connecting the Type 2179 MFC to a Solenoid Valve

How To Operate the Positive Shutoff Valve A
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endix E: Positive Shutoff Valve Information
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Figure 11 shows how to connect the 2179 MFC to the solenoid valve.
Power Suppl
y
Air Supply
Vent
Solenoid Valve
Type 2179 MFC
Figure 11: Connecting the Type 2179 MFC to a Solenoid Valve