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MKS Mini-Convectron 275 Series User Manual

MKS Mini-Convectron 275 Series
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Maintenance
Mini-Convectron Module Instruction Manual - 275513 49
4.2.2 Symptoms, Causes, and Solutions
Table 4-1 lists failure symptoms, causes, and solutions.
Table 4-1 Failure Symptoms, Causes, and Solutions
Symptom Possible Causes Solution
Output voltage = 0 V 11.5 to 26.5 V power supply cable
is improperly connected or faulty.
Repair or replace power supply
cable (see Section 2.3.3).
Pressure reading is too high.
Conductance in connection to
vacuum chamber is inadequate.
Plumbing to module leaks or is
contaminated.
Chamber pressure is too high due to
leak, contamination, or pump
failure.
Power supply or output cable is
improperly connected or faulty.
If conductance is inadequate,
reconnect Convectron gauge port to
vacuum chamber (see page 18).
If plumbing leaks or is
contaminated, clean, repair or
replace plumbing.
If pump failed, repair or replace it.
If cable is improperly connected or
faulty, repair or replace cable (see
Section 2.3.3).
Pressure reading is inaccurate.
Module is not calibrated for the
process gas that is being used.
Module is not mounted horizontally.
Convectron gauge or differential
pressure sensor is damaged (for
example, by reactive gas) or
contaminated.
Temperature or mechanical
vibration is extreme.
If Convectron gauge is out of
calibration, recalibrate it (see
Section 3.6).
If module is not mounted
horizontally, re-mount it (see
Figure 2-4).
If Convectron gauge is damaged,
replace it (see Section 4.4).
If Convectron gauge is
contaminated, return it to factory
(see pages Section 4.1 and 51).
If temperature or vibration is
extreme, relocate module or
eliminate source of heat or
vibration.
Indicated pressure is different than
pressure indications from other
measurement devices.
Process gas is a not the gas that the
user anticipated using in the system.
Convectron gauge is defective.
If the process gas is not what was
anticipated, calibrate the
Convectron gauge for the gas being
used (see Section 3.2.1 and Section
3.2.2).
If Convectron gauge is defective,
return it to factory (see pages 47
and 51).
Relay LED indicator is ON, but
relay is not functioning.
Relay contacts are defective. Make sure the relay load is within
the specified rating and is
non-inductive (see the
Specifications Appendix).
Relay will not activate.
Output voltage is < 0.10 V.
A circuit board is faulty.
Convectron gauge sensing wire is
open.
Return module to factory (see
Section 4.1).

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MKS Mini-Convectron 275 Series Specifications

General IconGeneral
BrandMKS
ModelMini-Convectron 275 Series
CategoryControl Unit
LanguageEnglish

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