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MKS Mini-Convectron 275 Series User Manual

MKS Mini-Convectron 275 Series
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Chapter 3
28 Mini-Convectron Module Instruction Manual - 275513
3.2 Nonlinear Analog Output
The module contains a convection-enhanced Pirani thermal conductivity gauge. The gauge
measures the heat loss from a heated sensing wire that is maintained at a constant temperature.
The analog output produces a nonlinear voltage that corresponds to measured pressure. Output
voltage is measured across pins 5 and 8 if the module has one setpoint relay or across pins 5 and 6
if the module has zero or two setpoint relays.
Refer to Table 3-6 to calculate pressure (y) as a function of output voltage (x). Figure 3-4 and
Figure 3-5 are graphs that represent true pressure for N
2
or air (y axis) versus voltage (x axis).
Output impedance is 100 Ω.
The output is normalized to 0.375 Vdc at vacuum chamber pressure and to 5.534 Vdc at 760
Torr (133.3 kPa, 1333 mbar) for N
2
or air.
The vacuum chamber pressure indicated by the gauge depends on the gas type, gas density
(pressure), and the module orientation. The module is factory calibrated for N
2
(air has approximately
the same calibration). For gases other than N
2
or air, heat loss varies at any given pressure, and you
must apply an appropriate conversion factor.
3.2.1 Commonly used Gases Other than N
2
or Air
Refer to Table 3-7 for pressure versus output voltage for 10 commonly used process gases other than
N
2
or air.
Refer to Figure 3-6, Figure 3-7, or Figure 3-8 to determine true pressure versus indicated pressure for
the gas that is being used.
3.2.2 Other Gases
If the gas being used is not included in Table 3-7, or for a gas mixture, you will need to generate a
calibration curve using a gas-independent transfer standard such as a capacitance manometer. Use
the following equation to determine the maximum usable output voltage:
Maximum usable output voltage = input voltage -4 Vdc

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MKS Mini-Convectron 275 Series Specifications

General IconGeneral
BrandMKS
ModelMini-Convectron 275 Series
CategoryControl Unit
LanguageEnglish

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