MKS Mini-Convectron 275 Series User Manual

Operation
Mini-Convectron Module Instruction Manual - 275513 29
Table 3-6 Equations for Calculating N
2
or Air Pressure Versus Analog Output Voltage
Segment Output Voltage Equation where y = Pressure and x = Voltage Coefficients
1 0.375 to 2.842 V a –0.02585
b 0.03767
c 0.04563
d 0.1151
e –0.04158
f 0.008737
2 2.842 to 4.945 V a 0.1031
b –0.3986
c –0.02322
d 0.07438
e 0.07229
f –0.006866
3 4.94 to 5.659 V a 100.624
b –0.37679
c –20.5623
d 0.0348656
y
Torr
abxcx
2
dx
3
ex
4
fx
5
++ + + +=
y
Pa
abxcx
2
dx
3
ex
4
fx
5
++ + + +()133.3×=
y
mbar
abxcx
2
dx
3
ex
4
fx
5
++ + + +()1.333×=
y
Torr
acxex
2
++
1bxdx
2
fx
3
++ +
--------------------------------------------=
y
Pa
acxex
2
++
1bxdx
2
fx
3
++ +
--------------------------------------------



133.3×
=
y
mbar
acxex
2
++
1bxdx
2
fx
3
++ +
--------------------------------------------



1.333×
=
y
Torr
acx+
1bxdx
2
++
-------------------------------=
y
Pa
acx+
1bxdx
2
++
-------------------------------



133.3×
=
y
mbar
acx+
1bxdx
2
++
-------------------------------



1.333×
=

MKS Mini-Convectron 275 Series Specifications

General

Brand	MKS
Model	Mini-Convectron 275 Series
Category	Control Unit
Language	English