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Mini-Convectron 275 Series
MKS Mini-Convectron 275 Series User Manual
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Chapter 3
30
Mini-Convectron Module Instruction Manual -
275513
Figure 3-4
Analog Output Voltage vs. Indicated N
2
or Air Pressure, 1 mTo
rr to 100 mTorr
29
31
Table of Contents
List of Catalog Numbers
4
Table of Contents
5
Safety
7
Installation
15
2.1 Module Components
15
2.2 Installing Pressure Relief Devices
16
2.3 Installation Procedure
16
2.3.1 Locate and orient the module
16
2.3.2 Attach the module to the vacuum chamber
18
2.3.3 Assemble and connect the wiring
19
2.3.4 Grounding
21
2.3.5 Configure the setpoint relays for the application
22
2.3.6 Calibrate the Convectron gauge
22
Operation
23
3.1 Preparing to Operate the Module
23
3.2 Nonlinear Analog Output
28
3.2.1 Commonly used Gases Other than N2 or Air
28
3.2.2 Other Gases
28
3.3 Setpoint Relays
39
3.3.1 Preparing to Adjust Setpoint Relays
40
3.3.2 Adjusting Setpoint Relays
40
3.4 Reading Relay Status
44
3.4.1 If the module without a display has one setpoint relay:
44
3.4.2 If the module has a digital display:
44
3.5 Calibrate the Convectron Gauge at Atmospheric Pressure
44
3.5.1 If the module does not have a digital display:
44
3.5.2 If the module has a digital display:
44
3.6 Calibrate the Convectron Gauge at Vacuum Chamber Pressure
45
3.6.1 If the module does not have a digital display:
45
3.6.2 If the module has a digital display:
45
3.7 Modules Operating at Low Pressure
46
3.8 Factory Settings
46
Maintenance
47
4.1 Customer Service
47
4.1.1 Damage Requiring Service
47
4.2 Troubleshooting
48
4.2.1 Precautions
48
4.2.2 Symptoms, Causes, and Solutions
49
4.3 Convectron Gauge Test
50
4.4 Convectron Gauge Removal and Replacement
51
4.4.1 Removing the Convectron Gauge
51
4.4.2 Replacing the Convectron Gauge
51
Specifications
53
Theory of Operation
57
Index
59
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MKS Mini-Convectron 275 Series Specifications
General
Brand
MKS
Model
Mini-Convectron 275 Series
Category
Control Unit
Language
English
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