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General| Brand | MKS |
|---|---|
| Model | T3BIA |
| Category | Control Unit |
| Language | English |
Defines WARNING, CAUTION, and NOTE messages used throughout the manual.
General safety precautions to be observed during all phases of instrument operation.
Details the format and structure of RS-232 commands and responses.
Explains the need for calibration mode for parameter security.
Outlines conventions used in RS-232 message syntax, including case sensitivity and spaces.
Describes command execution order, prioritization, and timing exceptions.
Configures operating parameters for the unit via RS-232 commands.
Procedure for calibrating the valve by cycling it between open and closed positions.
Configures the full-scale voltage range for pressure sensor input.
Details three available pump speed curves: factory default, learned, and custom.
Enables identification of system characteristics for Model Based Control.
Defines setpoint parameters including values, gains, phases, and process limit relays.
Directly controls valve and system actions via RS-232 commands.
Corrects sensor zero offsets by zeroing the selected pressure sensor range.
Calibrates the analog-to-digital converter span and zero for accurate readings.
Activates or deactivates relay 2 for backfill valve control or alarm functions.
Lists RS-232 commands for device operation, including pressure setpoint and slow pump control.
Lists RS-232 requests for device information, such as slow pump rate and enable status.
Explains how the slow pump feature adjusts setpoints gradually for chamber pressure changes.
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