MKS Mini-Convectron 275 Series User Manual

Chapter 3
32 Mini-Convectron Module Instruction Manual - 275513
Table 3-7 Voltages (Vdc) for Commonly used Gases, 0.1 mTorr to 1000 Torr
CH
4
.3896
.403 .438 .492 .584 .796
1.053 1.392 2.014 2.632 3.313
–
4.699 5/172 5.583 5.720 5.860
–
6.103
–
6.342
– –
6.519
–
6.642
Ne
.381 .388 .405 .433 .484 .608 .768
1.002 1.469 1.976 2.631 3.715 4.605 5.406 6.159 6.483 6.661 6.726 6.767 6.803 6.843 6.890 6.920 6.942 7.000 7.056
D
2
.386 .396 .425 .470 .549 .727 .944
1.265 1.914 2.603 3.508 5.059 6.361
– – – – – – – – – – – – –
Freon
22
.388 .400 .432 .480 .566 .764 .990
1.291 1.805 2.247 2.666 3.090 3.330 3.414 3.509 3.660 3.883 4.005 4.088 4.151 4.203 4.247 4.271 4.286 4.321 4.354
Freon
12
.388 .401 .437 .488 .581 .778
1.009 1.315 1.826 2.257 2.647 3.029 3.204 3.308 3.430 3.618 3.827 3.938 4.016 4.076 4.124 4.166 4.190 4.203 4.237 4.270
KR
.379 .384 .395 .415 .451 .544 .668 .847
1.194 1.536 1.921 2.429 2.734 2.966 3.075 3.134 3.269 3.384 3.466 3.526 3.573 3.613 3.632 3.645 3.674
–
CO
2
.385 .395 .412 .462 .536 .705 .900
1.179 1.668 2.172 2.695 3.316 3.670 3.903 4.071 4.154 4.336 4.502 4.621 4.708 4.775 4.830 4.860 4.877 4.919 4.955
O
2
.384 .392 .417 .453 .521 .679 .868
1.141 1.664 2.195 2.814 3.672 4.225 4.620 4.916 5.026 5.106 5.200 5.315 5.422 5.515 5.592 5.633 5.658 5.713 5.762
Helium
.382 .389 .409 .441 .497 .637 .814
1.068 1.589 2.164 2.939 4.387 5.774 7.314
– – – – – – – – – – – –
Argon
.381 .387 .403 .429 .477 .595 .745 .962
1.386 1.818 2.333 3.028 3.480 3.801 4.037 4.122 4.192 4.283 4.386 4.477 4.550 4.611 4.643 4.663 4.706 4.745
N
2
(air)
.384 .392 .417 .455 .523 .682 .876
1.155 1.683 2.217 2.842 3.675 4.206 4.577 4.846 4.945 5.019 5.111 5.224 5.329 5.419 5.495 5.534 5.558 5.614 5.659
True pressure
mbar 1.3 x 2.6 x 6.0 x 1.3 x 2.6 x 6.6 x 1.3 x 2.6 x 6.6 x 1.3 2.6 6.6 1.33 x 2.66 x 6.66 x 1.33 x 2.66 x 3.99 x 5.33 x 6.66 x 7.99 x 9.33 x 1.01 x 1.06 x 1.19 x 1.33 x
kPa 1.3 x 2.6 x 6.0 x 1.3 x 2.6 x 6.6 x 1.3 x 2.6 x 6.6 x 1.3 x 2.6 x 6.6 x 1.33 2.66 6.66 1.33 x 2.66 x 3.99 x 5.33 x 6.66 x 7.99 x 9.33 x 1.01 x 1.06 x 1.19 x 1.33 x
Torr or mTorr 1 mTorr 2 mTorr 5 mTorr 10 mTorr 20 mTorr 50 mTorr 100 0.2 Torr 0.5 Torr 1 Torr 2 Torr 5 Torr 10 Torr 20 Torr 50 Torr 100 Torr 200 Torr 300 Torr 400 Torr 500 Torr 600 Torr 700 Torr 760 Torr 800 Torr 900 Torr 1000

MKS Mini-Convectron 275 Series Specifications

General

Brand	MKS
Model	Mini-Convectron 275 Series
Category	Control Unit
Language	English