MKS 253B-2-2-2 - Figure 4: Type 253 Valve with a CF Flange; Figure 5: Type 253 Valve with a JIS Flange

Chapter Two: Installation Setu
p
25
15-Pin Type "D"
Connector
B
DIA
A
DIA
D
DIA Hole Throu
g
h
Type 253B-2-3CF-2 Shown
C
Driver/Gear
Assembly
Figure 4: Type 253 Valve with a CF Flange
15-Pin Type "D"
Connector
1.44
(36.5)
D
DIA Hole Throu
g
h
B
DIA
A
DIA
O-Rin
g
Supplied
by Customer
C
Type 253B-2-50J-2 Shown
Driver/Gear
Assembly
Figure 5: Type 253 Valve with a JIS Flange