MKS 253B-2-2-2 - ASA Flange Specifications

ASA Flange Specifications A
pp
endix A: Product S
p
ecifications
34
ASA Flange Specifications
Valve Type Number 253B-
2-2-1
253B-
2-2-2
253B-
60-2-1
253B-
60-2-2
253B-
3-2-2
253B-
3-3-2
253B-
4-3-2
Inside Diameter (A)*
Inches
(mm)
1.88
(47.8)
1.950
(49.5)
2.362
(60.0)
2.362
(60.0)
3.025
(76.8)
3.025
(76.8)
3.965
(100.7)
Mounting Flange
ASA 2” ASA 2” ASA 2” ASA 2” ASA 2” ASA 3” ASA 3”
Outside Diameter (B)*
Inches
(mm)
5.95
(151)
5.95
(151)
5.95
(151)
5.95
(151)
5.95
(151)
7.40
(188)
7.40
(188)
Controllable
Conductance (l/sec)
min
max
0.35
300
0.70
300
TBD
TBD
0.80
375
1.00
500
1.00
500
1.50
950
Closed Leakage
(Torr l/sec)
<10
-7
N/A <10
-7
N/A N/A N/A N/A
Flapper Seal**
Viton None Viton None None None None
Thickness (C)*
Inches
(mm)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.88
(22.4)
0.88
(22.4)
Overall Height
Inches
(mm)
10.79
(274.1)
10.79
(274.1)
10.79
(274.1)
10.79
(274.1)
10.79
(274.1)
12.24
(310.9)
12.24
(310.9)
No. of Bolt Holes
4444444
Bolt Hole
Diameter (D)*
Inches
(mm)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
Bolt Circle Diameter
Inches
(mm)
4.750
(120.7)
4.750
(120.7)
4.750
(120.7)
4.750
(120.7)
4.750
(120.7)
6.000
(152.4)
6.000
(152.4)
Flange O-ring groove
ID
In
(mm)
Parker
®
No. or
Size (JIS)
3.365
(85.5)
2-237
3.365
(85.5)
2-237
3.365
(85.5)
2-237
3.365
(85.5)
2-237
3.365
(85.5)
2-237
4.475
(113.7)
2-349
4.475
(113.7)
2-349
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