Micro-Ion
®
Module Instruction Manual - 356007-GP 7
Installation Operation MaintenanceIntroduction
Chapter 1 Introduction
1.1 About These Instructions These instructions explain how to install, operate, and maintain the
Granville-Phillips
®
Micro-Ion
®
Plus Vacuum Gauge Module. The module
contains a Micro-Ion ionization gauge and a Conductron
®
heat-loss sensor,
which working in combination provide pressure measurement from
1x10
–9
to atmosphere.
• This chapter explains caution and warning statements, which must be
adhered to at all times; explains your responsibility for reading and
following all instructions; defines terms that are used throughout this
manual; and tells you how to contact customer service.
• Chapter 2 explains how to install the module.
• Chapter 3 explains the theory of operation; module operating
procedures; how to read the analog output; and how to use the RS-485
interface.
• Chapter 4 explains troubleshooting; Micro-Ion gauge testing, removal
and replacement; and module return procedures.
• Appendix A explains filament operation modes of the Micro-Ion Gauge.
1.2 Caution and Warning
Statements
This manual contains caution and warning statements with which you must
comply to prevent inaccurate measurement, property damage, or personal
injury.
Caution and warning statements comply with American Institute of
Standards Z535.1-2002 through Z535.5-2002, which set forth voluntary
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.
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