MKS 356 Micro-Ion Plus Series User Manual

Chapter 2
16 Micro-Ion
®
Module Instruction Manual - 356007-GP
Step 3 Attach the Module to the Vacuum Chamber
Attach the module vacuum chamber fitting to its mate on the vacuum
chamber.
CAUTION
Twisting the module to tighten the fitting to the vacuum
chamber can damage the module’s internal connections.
• Do not twist the module to tighten the fitting.
• Use appropriate tools to tighten the fitting.
Table 2-1 Fittings for the Micro-Ion Plus Module
Fitting
Dim. H
cm in.
½–inch VCR-type male 5.8 2.3
1.33–inch (NW16CF) ConFlat type 4.3 1.7
2.75–inch (NW35CF) ConFlat type 4.3 1.7
NW16KF 2.0 0.8
NW25KF 2.0 0.8
NW40KF 2.0 0.8
NW16KF extended 4.2 1.65
NW25KF extended 4.2 1.65
NW40KF extended 4.6 1.8

MKS 356 Micro-Ion Plus Series Specifications

General

Brand	MKS
Model	356 Micro-Ion Plus Series
Category	Control Unit
Language	English