MKS 356 Micro-Ion Plus Series User Manual

Chapter 3
50 Micro-Ion
®
Module Instruction Manual - 356007-GP
3.19 RS-485 Commands - Set 2
The following eighteen RS-485 commands may affect the operation of the
Micro-Ion Module, and have default values. See Table 3-14 on page 46.
DG - Degas Commands The RS-485 command includes the alpha characters “D” and “G” and the
numeric value 0 (terminate) or 1 (initiate).
To degas the Micro-Ion gauge, follow these steps:
1. Turn ON the Micro-Ion gauge. (See Turn the Micro-Ion Gauge ON or
OFF on page 31.)
2. Make sure vacuum pressure is lower than 5 x 10
–5
Torr
(6.66 x 10
–5
mbar, 6.66 x 10
–3
pascal).
3. Send the degas gauge initiate (DG1) command to initiate the Micro-Ion
gauge degas cycle. The time for gauge degas is two minutes.
DG1 command from host: #01DG1↵
Response from module: *01 PROGM OK↵
4. If you want to terminate the Micro-Ion gauge degas cycle before it is
completed, send the degas gauge terminate (DG0) command.
DG0 command from host: #01DG0↵
Response from module: *01 PROGM OK↵
IG - Ion Gauge Commands The RS-485 command includes the alpha characters “I” and “G” and the
numeric value 0 (OFF) or 1 (ON).
Send the ion gauge OFF (IG0) command to turn OFF the Micro-Ion gauge.
IG0 command from host: #01IG0↵
Response from module: *01 PROGM OK↵
If you send the IG0 command, the Micro-Ion gauge remains OFF until you
send an IG1 command to turn it ON.
Send the ion gauge on (IG1) command to turn the Micro-Ion gauge ON.
IG1 command from host: #01IG1↵
Response from module: *01 PROGM OK↵
IGM - Ion Gauge Mode If the Micro-Ion gauge is OFF, the IGM (ion gauge mode) command can be
used to enable or disable pressure indications from the Conductron sensor.
The IGM RS-485 command includes the alpha characters “I”, “G”, and “M”
and the alphanumeric 0 (OFF) or 1 (ON).
Example IGM command from host:#01IGM1↵
Response from module: *01 PROGM OK↵
• The 0 switch disables pressure indications from the Conductron sensor
while the Micro-Ion gauge is OFF. The display reads OFF.
• The 1 switch enables pressure indications from the Conductron sensor
while the Micro-Ion gauge is OFF. (Minimum output is 1x10
-3
)

MKS 356 Micro-Ion Plus Series Specifications

General

Brand	MKS
Model	356 Micro-Ion Plus Series
Category	Control Unit
Language	English