MKS 356 Micro-Ion Plus Series User Manual

Operation
Micro-Ion
®
Module Instruction Manual - 356007-GP 45
Installation Operation MaintenanceBefore You Begin
3.17 RS-485 Command Sets Table 3-13 lists RS-485 commands that provide pressure values or other
information without affecting module operation.
Table 3-14 lists RS-485 commands that may affect module operation and
have default values.
Table 3-13 RS-485 Command Set for Values not Affecting Module Operation
Command
Command
Type
Non-volatile
Change
After
Reset
Data Returned
Can be
Locked
See
Page #
IGS Read No No Micro-Ion gauge ON/OFF status No 47
KBS Read Yes No Keyboard lock/unlock status No 49
RD Read No No Vacuum pressure No 47
RE Read No No Micro-Ion gauge emission current No 47
RF Read No No Micro-Ion gauge filament status No 47
RS Read No No Module status RS-485 string No 48
VER Read Yes No Firmware version No 48

MKS 356 Micro-Ion Plus Series Specifications

General

Brand	MKS
Model	356 Micro-Ion Plus Series
Category	Control Unit
Language	English