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356 Micro-Ion Plus Series
MKS 356 Micro-Ion Plus Series User Manual
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Table of Contents
Default Chapter
5
Table of Contents
5
Chapter 1 Introduction
7
About These Instructions
7
Caution and Warning Statements
7
System Grounding
8
Explosion / Implosion
8
Operation
9
Reading and Following Instructions
9
Customer Service
9
Definitions of Terms
10
Specifications
10
Chapter 2 Installation
13
Module Components
13
Installation Procedure
13
Step 1 Install Pressure Relief Devices
14
Step 2 Location of the Module
14
Step 1
14
Attach the Module to the Vacuum Chamber
16
Step 4 Assemble and Connect the Cables
17
Step 5 Calibrate the Conductron Sensor
23
Eliminating Radio Frequency Interference
23
Chapter 3 Operation
25
Preparing to Operate the Module
25
Theory of Operation
26
Set the Micro-Ion Gauge Emission Current Threshold
29
Set the Micro-Ion Gauge Filament Mode
29
Turn the Micro-Ion Gauge on or off
31
Read Vacuum Pressure
32
Read the Analog Output
33
Degas the Micro-Ion Gauge
34
Calibrate the Module at Atmosphere
35
Calibrate the Module at Vacuum
36
Process Control Relay Trip Points
36
RS-485 Operation and Commands
40
RS-485 Physical Layer
40
RS-485 Initial Setup
41
Data Timing and Response
42
RS-485 Command Structure
44
RS-485 Command Sets
45
RS-485 Commands - Set 1
45
RS-485 Commands - Set 2
50
RS-485 Error Responses and Display Error Codes
57
Chapter 4 Maintenance
59
Customer Service
59
Troubleshooting
60
Micro-Ion Gauge Continuity Test
63
Replacing the Gauge Assembly
66
Returning a Micro-Ion Module for Service
66
Filament Operation
67
4
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MKS 356 Micro-Ion Plus Series Specifications
General
Brand
MKS
Model
356 Micro-Ion Plus Series
Category
Control Unit
Language
English
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