Instruction Manual: AQUA kit for MA-3 Solo NIC-TD-0000187-01
Nippon Instruments Corporation 13
(3) In Hardware Check window, Check if the reading of FLOW METER is decreased.
If not, there is a leakage.
※ It takes 3-4min for the reading to become 0L/min.
(4) Slowly open the inlet of 1
st
impinger.
6. SPECIFICATION