Omron G9SX Series User Manual

4
G9SX
Basic Unit
G9SX-BC
Logical AND
connection
Logical AND
connection
(1) Emergency stop
switch
(1) Emergency stop
switch
Safety Door
Switch
Safety Door
Switch
Advanced Unit
G9SX-AD
Advanced Unit
G9SX-AD
(2) Processing
section cover
(3) Conveyor
section cover
(2) Processing section cover (3) Conveyor section cover
Segment C Segment B Segment A
Segment A Segment B
(3) The conveyor section
cover is opened.
Segment C
Stop
Segment A Segment B
(1) The emergency stop
switch is pressed.
Stop Stop
Segment C
Stop
Segment A
Segment B
(2) The processing section
cover is opened.
Stop
Segment C
Stop
Operating Example
• All of the equipment stops when the emergency stop switch is pressed.
• The processing section and conveyor section stop when the processing section cover is opened.
• Only the conveyor section stops when the conveyor section cover is opened.
Semiconductor Manufacturing Equipment
Segment C
Logical AND connection
Advanced Unit
G9SX-ADA
Basic Unit
G9SX-BC
(1) Emergency stop
switch
Safety Door
Switch
Advanced Unit
G9SX-AD
Advanced Unit
G9SX-AD
(2) Left door (3) Right door
Safety Door
Switch
Segment A Segment B
Segment A Segment B
(1) The emergency stop
switch is pressed.
Stop Stop
Segment A Segment B
(2) The left door is opened.
Stop
Segment A Segment B
(3) The right door is opened.
Stop
Segment C
Stop
Segment C
Stop
Segment C
Stop
(2) Left door (3) Right door
(1) Emergency stop
switch
Operating Example
• When the Emergency Stop Switch is pressed, the entire machine will stop.
• If the left door is opened, the left drive section and transport section will stop.
• If the right door is opened, the right drive section and transport section will stop.
Machine Tool

Omron G9SX Series Specifications

General

Response time	≤ 14 ms
Supply voltage	24 VDC
Reset function	Automatic or manual
Standards	ISO 13849-1
Operating temperature	55 °C