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OSAKA VACUUM TC163H Operation Manual

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H07401<2>
OPERATION MANUAL
SERIAL COMMUNICATION
POWER SUPPLY
FOR MOLECULAR PUMP
TC163H/TC203/TC223/TC353/TC523H/TC1104
TC443S/TC553/TC1003/TC1103/TC1503H/TC1813/TC3213
Before using the pump and the power supply, read carefully and understand
thoroughly the cautions in this manual.
Save this manual for future use and reference.
OSAKA VACUUM, LTD.
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OSAKA VACUUM TC163H Specifications

General IconGeneral
Frequency50/60Hz
Efficiency85%
Protection FeaturesOvercurrent protection, Overvoltage protection
Cooling MethodNatural Convection
Weight500g
Storage Temperature-20 to +85°C

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