404/406XR Series Product Manual Appendix C – Clean Room
45
Parker Hannifin Corporation
1140 Sandy Hill Road
Irwin, PA 15642
Test 2:
Horizontal Plane
Particle counter located below table surface
Class 100 Compatible
Test 3:
Horizontal Plane, Inverted Table
Particle counter located below table surface
Class 100 Compatible
Test 4:
Vertical Plane
Particle counter located below table surface
Class 10 Compatible
For more information please contact Parker Hannifin Corporation's Application Engineering
Department at
800-245-6903.
www.comoso.com
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