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Pfeiffer Vacuum HiPace Series User Manual
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OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 80 MINI
Turbopump
2
Table of Contents
Table of Contents
3
About this Manual
7
Validity
7
Related Documents
7
Variants
7
Target Group
7
Conventions
7
Instructions in the Text
7
Pictographs
8
Stickers on Product
8
Abbreviations
9
Trademark Proof
9
Tbl. 1: Abbreviations Used in this Document
9
Safety
10
General Safety Information
10
Safety Instructions
10
Safety Precautions
14
Limits of Use of Product
14
Proper Use
15
Foreseeable Improper Use
15
Personnel Qualification
15
Tbl. 2: Permissible Ambient Conditions
15
Ensuring Personnel Qualification
16
Personnel Qualification for Maintenance and Repair
16
Advanced Training with Pfeiffer Vacuum
16
Product Description
17
Function
17
Cooling
17
Rotor Bearing
17
Drive
17
Identifying the Product
17
Product Types
18
Product Features
18
Scope of Delivery
18
Tbl. 3: Product Designation of Pfeiffer Vacuum Hipace Turbopumps
18
Tbl. 4: Turbopump Features
18
Transportation and Storage
19
Transport
19
Storage
19
Installation
20
Preparatory Work
20
Fastening Turbopump to Bottom Part
20
Connecting the High Vacuum Side
21
Requirements for Dimensioning a Counter Flange
21
Tbl. 5: Requirements for Fastening the Turbopumps to the Bottom Part
21
Considering Earthquake Protection
22
Using Splinter Shield or Protective Screen
22
Tbl. 6: Requirements for Dimensioning High Vacuum Connection Supplied by Cus
22
Tbl. 7: Effect of Splinter Shield or Protective Screen on Pumping Speed
22
Using the Vibration Compensator
23
Mounting Orientations
23
Attaching ISO-K Flange Onto ISO-K
23
Installation of ISO-K Flange Onto ISO-F
24
Connecting Fore-Vacuum Side
25
Connecting Accessories
26
Connecting the Electrical Supply
27
Earthing the Turbopump
27
Establishing Electric Connection
28
Operation
30
Commissioning
30
Tbl. 8: Factory Setting of the Electronic Drive Unit for Turbopumps When Delivered
30
Operating Modes
31
Operation Without Operating Unit
31
Operation Via Multi-Function Connection "X3
31
Operation Via Pfeiffer Vacuum Control Unit
31
Operation Via Field Bus
31
Operation Monitoring
32
Operating Mode Display Via LED
32
Temperature Monitoring
32
Switching off and Venting
32
Switching off
32
Venting
33
Tbl. 10: Factory Settings for Delayed Venting in Turbopumps
33
Maintenance
34
General Maintenance Information
34
Maintenance Intervals and Responsibilities
34
Replace Operating Fluid Reservoir
35
Removing the Operating Fluid Reservoir
35
Assembling Operating Fluid Reservoir
36
Replacing Electronic Drive Unit
37
Confirming Speed Specification
38
Tbl. 11: Characteristic Nominal Rotation Speeds of the Turbopumps
39
Decommissioning
40
Shutting down for Longer Periods
40
Recommissioning
40
Recycling and Disposal
41
General Disposal Information
41
Dispose of Turbopumps
41
Malfunctions
42
Tbl. 12: Troubleshooting Turbopumps
43
Service Solutions by Pfeiffer Vacuum
44
Spare Parts Hipace 80 Mini
46
Tbl. 13: Overview of the Spare Parts Available for the Hipace 80 Mini
46
Accessories
47
Accessory Information
47
Ordering Accessories
47
Tbl. 14: Accessories
48
Technical Data and Dimensions
49
General
49
Technical Data
49
Tbl. 15: Conversion Table: Pressure Units
49
Tbl. 16: Conversion Table: Units for Gas Throughput
49
Tbl. 17: Hipace 80 Mini | DN63 ISO-K
50
Dimensions
51
EC Declaration of Conformity
52
Declaration of Conformity
53
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Pfeiffer Vacuum HiPace Series Specifications
General
Brand
Pfeiffer Vacuum
Model
HiPace Series
Category
Computer Hardware
Language
English
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