2
INDEX
Page
Page
1. Safety Instuctions ................................... 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2. Understanding The Pumps
TMH/TMU 064, TMH/TMU 065 ............... 4
2.1. Main Features ................................................................... 4
2.2. Differences Between The Pump Types ........................ 4
3. Installation.............................................. 5
3.1. Preparations For Installation .......................................... 5
3.2. Assembling The Pump, Connecting The
High Vacuum Side ............................................................ 5
Fitting The Splinter Shield ............................................... 6
3.3. Connecting The Fore-Vacuum Side............................... 6
3.4. Connecting The Cooling Unit .......................................... 6
Water Cooling (Accessory)............................................. 6
Air Cooling (Accessory)................................................... 7
3.5. Connecting The Casing Heating Unit ............................ 7
3.6. Connecting The Venting Valve ....................................... 8
3.7. Connecting The Electronic Drive Unit........................... 8
3.8. Connecting The Sealing Gas Valve ............................... 8
4. Operations................................................ 9
4.1. Before Switching ON......................................................... 9
4.2. Switching ON...................................................................... 9
Reset .................................................................................... 9
4.3. Heating (Only Pumps With Heating Sleeves))............... 9
4.4. Switching OFF And Venting.............................................. 9
4.5. Shutting Down For Longer Periods............................... 10
5. What To Do In Case Of
Breakdowns ? ........................................ 10
6. Maintenance.......................................... 11
6.1. Replacing The Lubricant Reservoir............................... 11
7. Service.................................................... 12
8. Technical Data....................................... 13
8.1. Dimensions Diagram ....................................................... 14
9. Spare Parts ............................................ 14
10. Accessories .......................................... 16
Declaration of Contamination..................... 17
Manufacturer’s Declaration........ (last page)