4
2.1. Main Features
Cooling
Standard: Convection cooling.
Alternative: Air or water cooling as an
accessory.
Integrated excess temperature safety feature:
Electronic drive unit reduces rotor rotation
speed to zero.
Bearings
High vacuum side: Wear free permanent magnetic
bearing.
Fore-vacuum side: Oil circulatory lubricated bearings with
ceramic balls.
Feature TMH 064 TMU 064
TMH 064 TMU 065
High vacuum flange ISO-K CF-F
High vacuum seal Viton Metal
Attainable final < 1 · 10
-8
mbar < 1 · 10
-10
mbar
pressure (without baking-out) (with baking-out)
2. Understanding The Pumps
TMH/TMU 064 und TMH/TMU 065
Proper use
– The Turbomolecular Pumps may only be used for the pur-
pose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– The turbomolecular pump may only be operated with a
PFEIFFER Electronic Drive Unit and relevant cables.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
Improper use
The following is regarded, inter alia, as improper:
– The pumping of explosive or corrosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 8. ”Technical Data”).
– The use of accessories which are not named in this
manual or which have not been agreed by the
manufacturer.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
Turbomolecular Drag Pump TMH 064
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
5 Power connection
6 Rubber feet
1
3
2
5
6
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