Raith 150 - Going into Standby; Shutting down the Instrument

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4.3 Going into standby

PROBLEM 3 ► The communication between the Raith PC and the High Speed Pattern

Generator failed.

Cause / solution The High Speed Pattern Generator hangs up or was turned off when

the Raith PC was booting. Reset the High Speed Pattern Generator

and restart the software.

If the communication still fails reset the High Speed Pattern Generator

and reboot the Raith PC.

4.3 Going into standby

STEP 1 ► Turn off EHT.

STEP 2 ► Turn of the gun.

STEP 3 ► Close the both programs on column and lithography PC. Shut down

the both PC’s.

STEP 4 ► Press the YELLOW “STANDBY” button on the front of the system.

Figure 4 Power

switch; use yellow

button for Standby.

4.4 Shutting down the instrument

If this is not an emergency shut down, disconnect the Airlock cable on

the back of the system. This prevents the system from venting.

STEP 5 ► Press the RED “OFF” button on the front of the system. The vacuum

pumps will stop.