21
5 Maintenance of system
5.1 Column maintenance 21
5.2 Filament lifetime 23
5.3 Utility maintenance 24
5.4 Sample holders 25
5.5 Computer systems 26
To keep the Raith electron-beam lithography-system operating at its
full potential, the customer may be asked to perform the following
tasks from time to time. Please keep this document close to the system
for easy reference. As improvements to the system and software are
made, this document will be updated and redistributed.
Please consult a Raith engineer with any questions or comments.
5.1 Column maintenance
Performing a bake out for the first time: Consult Raith first! Bake outs
need to be performed periodically to keep the tip healthy and stable,
but excessive bake outs will shorten the filament’s lifetime.
When baking out the column intense heat will develop. You should
therefore be careful not to place any flammable objects on the
protection grid behind the electron-optic column.
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