5 Maintenance of system
26
faraday cup. The cleanliness in this region of contact effects beam
current measurements. If an ultrasonic bath is not available wipe down
the contact points with Isopropanol or acetone and a lint-free cloth,
cleaning as often as necessary.
5.4.2 Cleaning Electrostatic Chuck
First of all, exercise extreme care when handling the electrostatic
chuck (ESC). The center Si chuck is NOT solidly fastened to the outer
ring or frame. On some ESC models, the center Si chuck is simply
sitting within the ring.
The best care for the center chuck is to keep it clean from the
beginning. The best method of keeping it clean is to use a CO
2
Snow
jet. If necessary, the center chuck can be cleaned in an ultrasonic bath.
If a sonic bath is not available, use a "wipe" method with acetone
FOLLOWED by IPA, with the same care you would use when wiping
a delicate laser optic. Liquids such as methanol, acetone, and hexane
are OK to use.
5.5 Computer systems
Standard maintenance procedures like de-fragmentation, backup of
data, applying Service Packs and bug fixing should be done on a
regular base. Installing service packs and bug fixes include the
operation systems as well as the Raith software. Please see section ►
section Notes concerning Personal Computer for additional
information and please note:
• Data backup: Frequently backup your user files to a remote
drive/media in case of Hard Drive Failure. If you do not backup
your system, Raith can restore your system after a hard drive
failure, but it will only involve the standard system files/settings.
In short, the system will be restored to the state it was in at the
time of original installation, any customization or user’s files will
be lost.
• Virus Protection: Install virus protection software if connected to
the internet and/or if users transfer files onto the system from
other computers. Raith makes no official recommendation on
virus protection software so please consult with your IT
department for advice and support. If you have no IT department,
we have found standard products like MacAfee, etc. are
invaluable. The same goes for firewall products. Consult Raith for
further information.
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