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2. SPECIFICATION
Table 1.Specifications of D07-7B
No. Item D07-7B
1 Ranges of Flow ( 0~5,10,20,30,50,100,200,300,500) SCCM
( 0~1,2,3,5,10) SLM
2 Accuracy ±1.5 % F.S
3 Linearity ±1 % F.S
4 Repeatability ±0.2 %F.S
5
Response-Time
(0~100%)
Electronic characteristic: 10 sec
Gas characteristic: ≤ 4
sec
6 Operation Pressure (0.1 ~ 0.5) MPa
7 Max Pressure 3 MPa
8 Operation Temperature 5 ~ 45 ℃℃
9 Input/Output Signal
0 V ~ +5.00 V
(Input resistance value 100K, output current 3mA)
10 Valve N.C.Solenoid
11 Power Supply
+15 V 50 mA
-15V 200 mA
12 Dimension
According to Figure 4
13 Weight 1.1 kg
Notes :
MFC/MFM is calibrated by N
2
as a standard gas.
Units: SCCM (Standard cubic centimeter/min);
SLM (Standard liter/min)
Standard situation: Temperature 273.15K (0 ºC); Air pressure 101325 Pa (760mm Hg)
F.S: Full Scale
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