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Figure 5. Dimension of D07-7BM/ZM
Attention :
The height of 108mm is the height without electric connector of cable. The height will be added 50mm
more after added the electric connector.
4.3 Fittings
The standard fittings are used Swagelok and VCR, there are five type’s fittings can be provided:
a. Swagelok ф3mm b. Swagelok ф6mm c. Swagelok 1/4" d. Swagelok 1/8" e. VCR 1/4"
Usually, Stainless steel tube was used to connect MFC and Gas System, and other material can be used such as
nylon tube or some flexible metal hose.
Figure 6 is an example of system construction. “ → ” shows the direction of flow, please pay attention for the
flow direction .
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