1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the FS4001 series of mass flow sensors for testing,
leakage detection, instrumentation as well as medical applications. The product performance,
maintenance, and troubleshooting, as well as the information for product order, technical support,
and repair, are also included.
The FS4001 sensors are manufactured with the company’s proprietary MEMS (micro-electro-
mechanical systems) sensing and package technology that offers primarily the mass flow rate
measurements of a full scale from 30 to 1000 sccm with a dynamic range of 100:1, and the maximum
pressure rating of 5 bar (75 psi).
To Next Page
Loading...