1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the FS8000 series of mass flow sensors. The products
are designed for applications in automation, testing, leakage detection, instrumentation, and
medical applications. The FS8001 has a pure analog version with a fast response time of 1 msec which
is particularly applicable for semiconductor equipment, such as die attachment and wire binder. The
product performance, maintenance, and troubleshooting, as well as the information for product
order, technical support, and repair, are also included.
The FS8000 sensors are manufactured with the company’s proprietary MEMS (micro-electro-
mechanical systems) sensing and package technology that offers primarily the mass flow rate
measurements of a full scale from 30 to 500 sccm with a dynamic range of 100:1 for FS8001 and up
to 6 SLPM for FS8003P. Both have a maximum pressure rating of 5 bar (75 psi).
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