-13-
No. DOC1045423
(4) Mounting the valve plate (EX600-ZMV3).
Mount the valve plate (EX600-ZMV3) to the valve manifold using the set screws (M3 × 8 mm) supplied.
(Tightening torque: 0.6 to 0.7 Nm)
Screw mounting places: 2 places
(5) Connect the SI unit assembly to the SUP/EXH block assembly.
Insert the valve plate into the valve plate mounting groove on the side of the SI unit.
Then fix it using the valve plate mounting screws (M4 × 6 mm) supplied.
(Tightening torque: 0.7 to 0.8 Nm)
⑤
Valve plate mounting groove
●Precautions for handling
•Please do not connect the unit while the power supply is ON. It will cause equipment damage.
•Take care not to drop the nuts for the Joint bracket.
•Tighten the screws to the specified torque.
Insufficient tightening may lead to equipment malfunction, injury, or equipment damage.
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