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Strasbaugh 6DS-SP - Page 423

Strasbaugh 6DS-SP
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Maintenance Model 6DS-SP Planarizer
3 - 2 Version 4.0 - February 1998
OVERVIEW 3
CABINETRY 4
Interlock Safety Switches 4
Service Door Interlocks 4
Operator Door Interlocks 5
PLANARIZER SUBASSEMBLIES 12
CONTROL PANEL AND EMERGENCY OFF BUTTONS 15
Control Panel 15
Additional Emergency Off Buttons 17
CONTROL COMPUTER 18
Where to Find More Information on the Software... 18
Where to Find More Information on the Control Computer System... 18
Flat Panel Display Operator Interface, Keypad, and Keyboard 19
Keypad and Keyboard 19
Menus 20

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