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General| Generator Type | RF Generator |
|---|---|
| Frequency | 13.56 MHz |
| Maximum Power | 1000 W |
| Cooling Method | Air cooling |
| Weight | Approx. 20 kg (44 lbs) |
| Power Output | 0 - 1000 W (adjustable) |
Measures for avoiding potential dangers and overview of residual dangers.
Explanation of signal words and symbols used for warnings on the generator.
Description of typical fields of application and impermissible uses of the generator.
Requirements for personnel performing installation, operation, configuration, and maintenance.
Visual identification and meaning of warning signs present on the generator.
Information on required warning signs and actions if they are missing or illegible.
Details life-threatening voltages present at the generator and protective measures.
Information on potentially harmful high-frequency electromagnetic fields and their effects.
Warnings and instructions regarding the generator's weight and safe handling.
Information on the aggressive nature of cooling water and necessary protective measures.
Key operational safety points and requirements for safe generator use.
Immediate actions to take in the event of an emergency.
Description of typical applications for the generator in plasma excitation.
Lists patents protecting the generator and mentions pending patents.
Details generator output power, frequency control, operation modes, and regulation parameters.
Describes the physical construction of the generator, including front and rear sides.
Lists available device variants, optional features, and accessories.
Explains how to identify generator features using a configuration word.
Provides detailed specifications for the generator's RF output power and performance.
Details accuracy specifications for output power in digital and analog control modes.
Specifies parameters like rise time, turn-off time, overshoot, and boot time.
Provides electrical specifications for connecting the generator to the mains supply.
Details specifications for clock input, output, and mode settings.
Describes phase coupling and frequency offset options for clock signals.
Explains automatic regulation of output frequency for optimum matching.
Specifies parameters for pulse mode, including frequency, duty cycle, and input/output signals.
Details specifications for arc synchronization input and output signals.
Lists available communication interfaces and their specifications.
Provides dimensions, weight, housing color, and protection class.
Includes detailed drawings with dimensions of the generator.
Specifies operating, storage, and transport conditions for temperature, humidity, and air pressure.
Details parameters and requirements for the generator's cooling water system.
Covers standard and customer variants, connection, telegrams, and parameters.
Explains view, cable requirements, connection, signals, and variants.
Details view, connection, pin assignment, features, configuration, and module structure.
Covers position, connection, pin assignment, status LEDs, ODVA, and protocol.
Details view, connection, cable requirement, objects, vendor ID, data communication, and indicator elements.
Describes the view, connection, and purpose of the service interface.
Explains view, connection, and cable requirements for clock synchronization.
Describes view, connection, and cable requirements for synchronization signals.
Details view, connection, description, and cable requirements for the matchbox.
Explains the meaning and color of device status LEDs.
Shows view, connection, and pin assignment for the mains input.
Illustrates view and connection for RF output, and specifies cable requirements.
Shows view and connection for cooling water, including thread specifications.
Defines the ASIP protocol, bit transmission, settings, framing, and data transmission.
Lists EU directives and standards considered for CE certification.
Explains the generator's classification as Group 2, Class A under EN 55011.
Details compliance with SEMI standards for environmental, health, safety, and electrical design.
States that the product was certified by an accredited testing laboratory.
Confirms product compliance with FCC rules for industrial, scientific, and medical devices.
Mentions certification on request for compliance with South Korean regulations.
Instructions for inspecting the generator for completeness and damages upon delivery.
Guidance on disposing of packaging materials in compliance with regulations.
Safety precautions for transporting and conditions for storing the generator.
Specifies requirements for installing external mains separation devices and selecting a location.
Details module fastening procedures, including thread size and torque.
Outlines the sequential order for connecting the generator's components.
Instructions for connecting the cooling water circuit, including pipe connection and adapter usage.
Explains how to connect control lines, including interlock and other interfaces.
Provides instructions for connecting the RF output, including safety warnings.
Details connection of the mains cable, safety requirements, and specific connection for models.
Describes the connection principle and requirements for an optional matchbox.
Provides step-by-step instructions for safely dismantling the generator.
Guidance on proper packaging for shipping the generator.
Instructions on observing local regulations for generator disposal.
Instructions on how to activate, change, and display the active generator interface.
Details system requirements, installation, connection setup, and operation using TruControl Power software.
Explains how to switch between RS-232 and RS-485 and set the slave address.
Covers scaling analog inputs and outputs for generator control.
Instructions for setting the Profibus address for optional communication.
Details setting the baud rate and node address for DeviceNet communication.
Instructions for setting the node address and displaying EtherCAT states.
Covers switching power on/off and regulating power using various modes like Pi, PL, Pr.
Explains available clock modes: Phase offset, Frequency offset, and Frequency agility.
Describes the function, parameters, and modes of frequency agility.
Details setting pulse mode, pulse increase, external pulse source, and output.
Explains different regulation behaviors like soft start, normal start, and precharge extension.
Instructions on how to set the timer for output power switch-off.
Specifies parameters for energy transfer control to the load.
Details how to set ramp functions for output power changes.
Covers arc detection modes, handling, and specific settings for arc management.
Explains the importance and configuration of run-time monitoring for active interfaces.
Describes matchbox operation via different interfaces and adjustment parameters.
Allows users to define limit values for Pi, PL, and Pr.
Explains how to activate and use mixed mode for controlling the generator.
Instructions for resetting parameters to factory default values.
Details how to synchronize the generator's time with the computer's local time.
Covers displaying pending messages, message history, monitoring, and identification.
Instructions for performing trending and setting trigger conditions for oscilloscope.
Covers essential maintenance tasks like software updates and checking cooling circuits.
Specifies parameters and limit values for checking cooling water quality.
Guidance on using and apportioning cooling water additives, including safety notices.
Procedures for cleaning and maintaining the generator and its cooling system.
Lists available cooling water additives, their function, color code, and material numbers.
Explains fault indication, alarm and warning messages, and how to reset them.
Provides a comprehensive list of error codes, their causes, and suggested measures.
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