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Ulvac GLD-137CC - 7. Disposal

Ulvac GLD-137CC
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7. Disposal
Follow state law and local government regulations for disposal of the pump.
① In case a harmful toxic gas has been exhausted by accident, ask a
specialist for waste disposal. Not only the pump itself but also the pump
oil become toxic.
② For the disposal of pump oil, follow the instructions given under
“Cautions for disposal” in “Safety Data Sheet.”
③ Delegate the disposing of inlet filters to venders for waste disposal.
Caution

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