Ulvac GP-1GRY - Page 28

APPENDIX
- 20 -
10
-1
10
0
10
1
10
2
10
3
10
4
10
-1
10
0
10
1
10
2
10
3
10
4
Ｈ
２
Ｈ ｅ
Ｎ
２
Ｏ
２
Ａ ｒ
Ｃ Ｏ
２
Pressure (Pa)
Indication of Pirani gauge (Pa)
Indication of
Pirani gauge
(Pa)
Absolute pressure of Gas (Pa)
H
2
He
N
2
O
2
Ar
CO
2
CO
SF
6
CC1
2
F
2
CC1
4
NH
3
0.5
1
2
5
10
20
50
100
200
500
1000
3.1E-1
1.0
1.8
5.3
9.3
1.7E+1
3.5E+1
5.6E+1
8.2E+1
1.3E+2
1.9E+2
9.7E-1
1.9
3.3
7.7
1.5E+1
2.7E+1
6.0E+1
1.1E+2
1.8E+2
3.3E+2
4.4E+2
-
7.8E-1
1.7
5.1
9.4
2.0E+1
5.1E+1
1.0E+2
2.0E+2
5.0E+2
1.0E+3
5.3E-1
1.0
1.8
4.3
8.5
1.9E+1
5.1E+1
1.0E+2
2.0E+2
5.0E+2
1.0E+3
-
1.1
2.5
6.7
1.3E+1
2.9E+1
8.5E+1
1.9E+2
3.7E+2
1.3E+3
8.0E+3
5.3E-1
1.0
1.8
4.3
8.0
1.7E+1
5.1E+1
1.1E+2
2.3E+2
8.5E+2
8.0E+3
5.9E-1
1.2
2.3
5.3
1.1E+1
2.1E+1
5.2E+1
1.1E+2
2.1E+2
5.3E+2
1.0E+3
3.7E-1
8.2E-1
1.7
4.7
9.8
2.1E+1
4.0E+1
9.0E+1
2.4E+2
2.0E+3
-
7.4E-1
1.1
2.0
4.1
7.4
1.5E+1
4.0E+1
9.6E+1
3.3E+2
-
-
2.0E-1
6.0E-1
1.2
2.9
5.6
1.2E+1
3.7E+1
1.2E+2
-
-
-
4.3E-1
8.2E-1
1.6
3.7
7.2
1.9E+1
4.5E+1
8.0E+1
1.3E+2
3.5E+2
5.9E+2
(Fron 12)
Remarks: Sensor head: WP-01, Controller: GP-2T.
The absolute pressure was measured by a diaphragm gauge.
The indication of the Pirani gauge was calibrated with dry air.
Fig. 7 Indications of various types of gas