Ulvac GP-1GRY - Table of Contents

CONTENTS
Contents
Page
Prior to Use ............................................................................................................................ i
Safety Denotations .................................................................................................................. i
Safety Cautions .................................................................................................................... ii
Location of Cautionary Label ............................................................................................ vi
Revision History.................................................................................................................. vii
1. OVERVIEW .................................................................................................................... 1
1.1. Specifications ................................................................................................... 1
1.2. Standard Accessories ....................................................................................... 1
1.3. Options.............................................................................................................. 1
1.3.1. Sensor head ............................................................................................... 1
1.3.2. Measuring unit ......................................................................................... 2
1.3.3. Sensor head cable ..................................................................................... 2
1.3.4. Others ........................................................................................................ 2
1.4. Description of Components ............................................................................. 3
2. INSTALLING THE PIRANI GAUGE........................................................................... 7
2.1. Preliminary Operation .................................................................................... 7
2.2. Installation ....................................................................................................... 7
2.2.1. Installing the controller ........................................................................... 7
2.2.2. Installing the meter ................................................................................. 7
2.2.3. Installing the sensor head ....................................................................... 8
2.2.4. Electrical connection ................................................................................ 8
2.2.5. A sensor head installation method to GP-H ......................................... 10
3. OPERATING PROCEDURE ....................................................................................... 11
3.1. Handling ......................................................................................................... 11
3.2. Meter Relay Action ........................................................................................ 12
3.3. Recorder Output ............................................................................................ 13
4. TROUBLESHOOTING ................................................................................................ 15
5. APPENDIX ................................................................................................................... 18
5.1. Principles of Operation..................................................................................
18
5.2. Types of Gas Measured and Indication ........................................................ 19
5.3. Accuracy of Pirani Vacuum Gauge .............................................................. 21
6. WARRANTY ................................................................................................................. 24
7. CERTIFICATE OF DECONTAMINATION............................................................... 25
8. CHINA ROHS DECLARATION ................................................................................. 26
9. RELATED DRAWINGS ............................................................................................... 27