Ulvac GP-1GRY - Page 30

APPENDIX
- 22 -
1 10 100 1000
1
10
100
1000
Indicated Values (Pa)
+3%
-3%
0.4
Working Standard (Pa)
0.01 0.1 1 10
0.01
0.1
1
10
-3%
+3%
Working Standard (Torr)
0.003
Indicated Values (Torr)
Fig. 9 Indication Values – Working Standard