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HPS-600N
Ulvac HPS-600N User Manual
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EB0039-09e
Operation
Manual
Electron Beam
Power Supply
Electron Beam Gun C
ontroller
Model:
Power Suppl
y Main Unit
HPS-600N/HPS
-
1000N
Gun Controller
EGC-10GS
10
th
edition:
july
,
14
, 20
22
UL
V
A
C, Inc.
Components Divis
ion
Before using this product, be sure to read it.
Also, keep this manual at hand with care.
2
Table of Contents
Table of Contents
9
For Your Safety Use
10
Caution on Handling
10
When You Make an Inquiry
10
Overview
11
Introduction
11
Feature
11
Equipment Configuration
12
EB Power Supply Specifications
14
External I/O Signal
16
Preparation
18
Precautions in Unpacking
18
Check after Unpacking
18
About Transportation of Power Supply
19
Installation Site and Installation
20
Things to be Prepared
21
Power Receiving Equipment
21
Cable Connection
23
Description of each Part
27
Front Panel of Power Supply Main Unit
27
Back Panel of Power Supply Main Unit
29
Alarm Fuse
34
Gun Controller Front Panel
36
Gun Controller Back Panel
37
Local Control Box
45
Operation
49
Pre-Operation Check
49
LOCAL Operation
52
LOCAL Operation with G-TYPE
53
LOCAL Operation with S-TYPE
58
PROGRAM Operation
64
Power Supply Error State
66
Maintenance
68
Maintenance/Inspection of this Product
69
Periodical Inspection
71
About Recommended Replacement Parts
73
Troubleshooting
74
Attached Data
82
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Ulvac HPS-600N Specifications
General
Brand
Ulvac
Model
HPS-600N
Category
Power Supply
Language
English
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