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Ulvac HPS-600N - User Manual

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EB0039-09e
Operation Manual
Electron Beam Power Supply
Electron Beam Gun Controller
Model: Power Supply Main Unit HPS-600N/HPS-1000N
Gun Controller EGC-10GS
10th edition: july, 14, 2022
ULVAC, Inc.
Components Division
Before using this product, be sure to read it.
Also, keep this manual at hand with care.

Questions and Answers

  • F
    fsandovalNov 20, 2025
    Why does the OVERLOAD indicator light up when I switch the high voltage ON with my Ulvac HPS-600N?
    • J
      jwatkinsNov 21, 2025
      If the high voltage is switched to ON and the OVERLOAD indicator lights up, immediately switching the high voltage to OFF, it could be due to several reasons: * A ground fault in the high voltage line of the EB gun: Inspect the high voltage line, ensuring the OUTPUT cable of the EB power supply is disconnected, and use a 1,000V megohmmeter to check the insulation. * Emitter assembly insulation failure: Refer to the EB gun's operations manual to inspect the emitter assembly. * High voltage introduction terminal insulation failure: Examine the isolation insulator, replacing it if there’s significant dirt from deposited film. * Glow electric discharge: Ensure the pressure is set to 5 x 10-3 Pa or less. * Power supply breakdown: Check if HV ON works with no load. Note: This is dange...
  • B
    Brandy LeeAug 25, 2025
    What to do if OVERLOAD blinks when high voltage is switched ON on Ulvac HPS-600N Power Supply?
    • J
      Jeffrey ChenAug 25, 2025
      If the high voltage is switched to ON and OVERLOAD blinks on the screen of your Ulvac Power Supply, it is likely due to abnormal electric discharge on the loading side. This can be caused by dirt. If the issue persists, perform maintenance on the high voltage line and the EB gun.
  • K
    Kerri ColemanAug 26, 2025
    Why is the Gun controller READY indicator not lighting up on my Ulvac HPS-600N?
    • M
      Maria FloresAug 27, 2025
      If the Gun controller READY indicator on your Ulvac Power Supply does not light up, check the following: * **SERVICE KEY settings**: Ensure the SERVICE KEY is in the ENABLE state, not LOCK mode. * **Fuse indicator**: Check the fuse indicator of the power supply main unit. * **Fan rotation**: Make sure the fan is rotating and remove any foreign substances that may be stopping it.
  • V
    vargastaylorAug 27, 2025
    Why does no beam current pass through my Ulvac HPS-600N Power Supply?
    • J
      Jeremy MitchellAug 27, 2025
      If no beam current passes with your Ulvac Power Supply, verify the following: * Check that a high voltage is applied. * Confirm that it is not in DEGAS mode and release it if it is. * Check the wiring of the filament line. Also, consider potential issues on the loading side, such as poor insulation or contact of the filament line due to assembly failure of the EB gun, or dirt on the isolation insulator.
  • D
    Duane HallAug 29, 2025
    Why does the fuse blow when the high voltage is switched ON in my Ulvac Power Supply?
    • J
      Jennifer DuffyAug 29, 2025
      If the high voltage is switched to ON and the fuse is blown in your Ulvac Power Supply, it could be because the beam current command signal is maximized. Check the command signal of the beam current. A large inrush current may pass at the instant when the high voltage is switched to ON if the signal is maximized.
  • S
    Stephanie FisherSep 23, 2025
    What causes my Ulvac HPS-600N Power Supply not to reach the rated current?
    • J
      Jennifer GonzalezSep 23, 2025
      If it does not reach up to the rated current on your Ulvac Power Supply, check the following: * Verify whether MAX POWER is set. * Check whether the high voltage is set to -10 kV, as beam current extraction efficiency varies depending on high voltage settings. * Inspect the emitter assembly and the high voltage introduction terminal of the EB gun for poor contact. Additionally, refer to the EB gun's operations manual to check the electrode size of the emitter assembly, and inspect the filament lead wire, replacing it if the thickness becomes approximately 80% of a new one.
  • C
    Charles AndersonSep 16, 2025
    What to do if high voltage changes when increasing HV SWEEP on Ulvac HPS-600N Power Supply?
    • L
      Lori ReynoldsSep 16, 2025
      If when increasing HV SWEEP, the high voltage changes on your Ulvac Power Supply, set the high voltage again.
  • J
    johnchandlerSep 18, 2025
    Why does emission pass when the high voltage is switched ON with my Ulvac HPS-600N?
    • N
      Nathaniel CarlsonSep 18, 2025
      If, when the high voltage is switched to ON, the emission passes on your Ulvac Power Supply, check the following: * Ensure that the local control box command and the external command signal are 0. * Check whether a glow discharge occurs in the vacuum chamber and ensure that the pressure is 5 x 10-3 Pa or less. * Check whether the OVERLOAD indicator is blinking. If the unusual electrical discharge is not reduced, do the maintenance in the vacuum chamber, such as cleaning.
  • K
    kristen95Sep 8, 2025
    Why doesn't HV ON work even after pressing the ON button on my Ulvac HPS-600N?
    • D
      davisjacobSep 8, 2025
      If HV ON does not work even after pressing the ON button on your Ulvac Power Supply, it could be due to several reasons: * HV SWEEP not working: Consult Section 5. * INTERLOCKS connector issue: Check the INTERLOCKS connector, specifically the contact between Pin 7 and Pin 8, referring to Fig. 4.7 for wiring and contacts. * KEY switch in LOCK state: Ensure the KEY switch is in the LOCAL mode, not LOCK mode.
  • J
    Jacqueline MahoneySep 5, 2025
    What causes the Gun controller indicator to turn off with the key switch at LOCAL on my Ulvac HPS-600N Power Supply?
    • K
      karinamartinezSep 5, 2025
      If the Gun controller indicator is turned off with the key switch at LOCAL on your Ulvac Power Supply, check the connections of the interlock on the equipment. Also, check whether there is a ground fault of the interlock signal.

Ulvac HPS-600N Specifications

General IconGeneral
BrandUlvac
ModelHPS-600N
CategoryPower Supply
LanguageEnglish

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