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Ulvac RFS-1305L - User Manual

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RF0029E-17
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Solid-State RF Power Supply
Matching Box
Model:
RF Power Supply
RFS-1305L
/
RFS-1310L
/
RFS-1330L
RFS-1350LH
/
RFS-13100L
/
RFS-2750L
RFS-2775L
Control Panel
RFP-L
Matching Box
MBX-1305L
/
MBX-1305Lu
/
MBX-1310L
MBX-1330L
/
MBX-1330Lu
/
MBX-1350L
MBX-13100L
/
MBX-2750L
/
MBX-2775L
Matching Controller
AMC-8L
/
AMC-9L
AMC-8LT
/
AMC-9LT
Revised 17th edition 08/29/2023
ULVAC,Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

Table of Contents

Questions and Answers

  • A
    Ashley SantiagoAug 6, 2025
    Why does the ALARM [DC SOURCE FAIL] appear on my Ulvac Power Supply when I turn it on?
    • D
      Dr. Tammy Miranda PhDAug 6, 2025
      If the alarm [DC SOURCE FAIL] appears when you turn on the breaker of your Ulvac Power Supply, it might be due to an incorrect three-phase 200 V phase order (R, S, T). Verify the phase order and correct it if necessary. If the problem persists, it may indicate internal component damage, and you should contact Ulvac for assistance.

Ulvac RFS-1305L Specifications

General IconGeneral
ModelRFS-1305L
ManufacturerUlvac
TypeRF Power Supply
Frequency13.56 MHz
Output Power500 W
Input Voltage200-240 VAC
Input Frequency50/60 Hz
Cooling MethodForced air cooling
Output Impedance50 Ω
InterfaceAnalog

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