Ulvac RFS-1305L User Manual

RF0029E-17
I
I
n
n
s
s
t
t
r
r
u
u
c
c
t
t
i
i
o
o
n
n
M
M
a
a
n
n
u
u
a
a
l
l
Solid-State RF Power Supply
Matching Box
Model:
RF Power Supply
RFS-1305L
/
RFS-1310L
/
RFS-1330L
RFS-1350LH
/
RFS-13100L
/
RFS-2750L
RFS-2775L
Control Panel
RFP-L
Matching Box
MBX-1305L
/
MBX-1305Lu
/
MBX-1310L
MBX-1330L
/
MBX-1330Lu
/
MBX-1350L
MBX-13100L
/
MBX-2750L
/
MBX-2775L
Matching Controller
AMC-8L
/
AMC-9L
AMC-8LT
/
AMC-9LT
Revised 17th edition 08/29/2023
ULVAC,Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

Ulvac RFS-1305L Specifications

General

Brand	Ulvac
Model	RFS-1305L
Category	Power Supply
Language	English