Ulvac RFS-1310N User Manual

RF0040E-18
I
I
n
n
s
s
t
t
r
r
u
u
c
c
t
t
i
i
o
o
n
n
M
M
a
a
n
n
u
u
a
a
l
l
High-Frequency Power Supply
RF Generator
Matching Box
Model:
Control Panel
RFP-N
RF Generator
RFS-1305N
RFS-1310N
RFS-1330N
RFS-1350N
Matching Box
MBX-1305N
MBX-1310N
MBX-1330N
MBX-1350N
Revised 18th Edition 2023/07/19
ULVAC Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

Ulvac RFS-1310N Specifications

General

Brand	Ulvac
Model	RFS-1310N
Category	Power Supply
Language	English