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Ulvac RFP-N User Manual

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High-Frequency Power Supply
RF Generator
Matching Box
Model:
Control Panel
RFP-N
RF Generator
RFS-1305N
RFS-1310N
RFS-1330N
RFS-1350N
Matching Box
MBX-1305N
MBX-1310N
MBX-1330N
MBX-1350N
Revised 18th Edition 2023/07/19
ULVAC Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

Table of Contents

Questions and Answers:

Ulvac RFP-N Specifications

General IconGeneral
BrandUlvac
ModelRFP-N
CategoryPower Supply
LanguageEnglish

Summary

For Safe Operation

Safety Precautions

Details critical safety measures including high voltage hazards and electric shock prevention.

Warning Labels and Nameplates

Explains the importance and maintenance of warning labels and nameplates on the system.

Contact Information

Provides guidance on who to contact for inquiries, parts orders, and malfunctions.

System Overview

Introduction, Features, and Configuration

System purpose, key features, components, and interconnections.

Cooling Water Quality Standards

Specifies required water quality parameters for optimal system performance.

RF Generator Specifications and Functions

Detailed specs for RFS models, common functions, alarms, and warnings.

Controller and Matching Box Specifications

Specs for RFP-N controller and MBX models, including common sensor specs.

System Setup

Accessory Check and RF Generator Installation

Verifies accessories and covers RF generator installation, mounting, and environment.

Matching Box Installation and Connector Output

Procedures for matching box installation, including connector output considerations.

System Wiring and Grounding

Covers system wiring, cable connections, RF generator input wiring, and earth terminal connection.

Interlock System

Describes the product's interlock mechanism and its detection points for safety.

System Functions

RF Generator Panel Operations

Covers front/rear panel functions, control panel operation, and special commands.

RF Generator Protection and External Control

Details protection functions, alarms, and RS-232C external control methods.

Matching Box Functions and Parameters

Describes matching box connectors, parameter functions, and configuration screens.

System Operation

RF Generator Startup and Local Operation

Procedures for turning on the RF generator and operating it locally via the panel.

Remote and Preset Operation Methods

Explains remote operation using external signals and preset operations via program numbers.

Special Commands

Lists special commands for maintenance mode, interlock clearing, and panel lock reset.

Matching Adjustment

Matching Fundamentals and Adjustment Procedure

Explains basic matching circuits and guides users on adjusting variable capacitors.

Internal Coil and Capacitor Adjustments

Covers internal adjustments to coils, taps, and adding fixed capacitors for matching.

Power Derating Tables

Provides derating reference values for MBX models under various load conditions.

System Maintenance

RF Generator Maintenance & Inspection

Details recommended periodic replacement parts and inspection procedures for RF generators.

Matching Box Maintenance & Inspection

Lists recommended periodic replacement parts and overhaul intervals for matching boxes.

Troubleshooting

RF Generator Troubleshooting

Provides a list of common RF generator problems and their potential causes and solutions.

Matching Box Troubleshooting

Lists common matching box problems, their causes, and corrective actions.

Reference Materials

System Reference Documents

Lists documents and drawings provided as references for the system.

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