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Ulvac RFP-N - User Manual

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RF0040E-18
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High-Frequency Power Supply
RF Generator
Matching Box
Model:
Control Panel
RFP-N
RF Generator
RFS-1305N
RFS-1310N
RFS-1330N
RFS-1350N
Matching Box
MBX-1305N
MBX-1310N
MBX-1330N
MBX-1350N
Revised 18th Edition 2023/07/19
ULVAC Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

Table of Contents

Questions and Answers

  • W
    William GonzalezAug 3, 2025
    Why is the screen blank on my Ulvac Power Supply even when it's turned on?
    • D
      Diane NewmanAug 3, 2025
      The screen might be blank on your Ulvac Power Supply because the required voltage has not been applied. Ensure that the correct voltage is supplied to the device.
  • J
    Janet PottsAug 7, 2025
    What to do if RF-ON is red but there is no output on my Ulvac Power Supply?
    • J
      Joseph SmithAug 7, 2025
      If the RF-ON indicator is red but there's no output from your Ulvac Power Supply, it could be due to several reasons: if set to external control, the external command voltage may not be supplied; the output setting might be at 0 W; or if the OSC setting is EXT, there might be no OSC signal input. Ensure that external command voltage is supplied, adjust the output setting above 0 W, and provide an OSC signal when set to EXT.
  • Q
    qelliottAug 12, 2025
    Why does my Ulvac RFP-N Power Supply show a "DC SOURCE FAIL" alarm when turned on?
    • M
      Michelle SmithAug 12, 2025
      The "DC SOURCE FAIL" alarm on your Ulvac Power Supply indicates that the required voltage has not been applied, or there may be internal component damage. Check the applied voltage and inspect the device for any signs of internal damage.
  • J
    jamesparksAug 16, 2025
    Why isn't the output reaching the set value when RF-ON is red on my Ulvac Power Supply?
    • J
      Jason FarleyAug 16, 2025
      If RF-ON is red but the output doesn't reach the set value on your Ulvac Power Supply, it could be due to internal element damage within the RF Generator, a drop in external command voltage (if set to external control), or a matching issue. Check for internal element damage, monitor the external command voltage, and ensure that matching is achieved.
  • R
    Rebecca CharlesAug 20, 2025
    How to fix "INTERLOCK" display and RF not turning on issue on Ulvac Power Supply?
    • G
      Grace DavisAug 20, 2025
      If your Ulvac Power Supply displays "INTERLOCK" and the RF won't turn on, it means that pins 16 and 17 of the external control connector ("EXT.CONT") are not short-circuited, or the matching box interlock hasn't been released. Check the short circuit of pins 16 and 17 and release the matching box interlock.
  • A
    Andrea ThompsonAug 25, 2025
    What to do if RF won't turn on after resetting the interlock and alarm on my Ulvac RFP-N?
    • R
      Robert TurnerAug 26, 2025
      If you've reset the interlock and alarm on your Ulvac Power Supply, but the RF still won't turn on, it may be because you're not in the correct mode for external control or panel operation of RF-ON/RF-OFF. Alternatively, there could be damage to an internal component. Ensure that the correct mode is selected and check for any internal component damage.
  • D
    Debra JohnstonAug 29, 2025
    Why is the control panel text garbled on my Ulvac Power Supply?
    • T
      Tracy DavisAug 29, 2025
      If the text on your Ulvac Power Supply's control panel is garbled, it might be due to noise. Try turning the breaker off and on to see if the issue resolves.

Summary

For Safe Operation

Safety Precautions

Details critical safety measures including high voltage hazards and electric shock prevention.

Warning Labels and Nameplates

Explains the importance and maintenance of warning labels and nameplates on the system.

Contact Information

Provides guidance on who to contact for inquiries, parts orders, and malfunctions.

System Overview

Introduction, Features, and Configuration

System purpose, key features, components, and interconnections.

Cooling Water Quality Standards

Specifies required water quality parameters for optimal system performance.

RF Generator Specifications and Functions

Detailed specs for RFS models, common functions, alarms, and warnings.

Controller and Matching Box Specifications

Specs for RFP-N controller and MBX models, including common sensor specs.

System Setup

Accessory Check and RF Generator Installation

Verifies accessories and covers RF generator installation, mounting, and environment.

Matching Box Installation and Connector Output

Procedures for matching box installation, including connector output considerations.

System Wiring and Grounding

Covers system wiring, cable connections, RF generator input wiring, and earth terminal connection.

Interlock System

Describes the product's interlock mechanism and its detection points for safety.

System Functions

RF Generator Panel Operations

Covers front/rear panel functions, control panel operation, and special commands.

RF Generator Protection and External Control

Details protection functions, alarms, and RS-232C external control methods.

Matching Box Functions and Parameters

Describes matching box connectors, parameter functions, and configuration screens.

System Operation

RF Generator Startup and Local Operation

Procedures for turning on the RF generator and operating it locally via the panel.

Remote and Preset Operation Methods

Explains remote operation using external signals and preset operations via program numbers.

Special Commands

Lists special commands for maintenance mode, interlock clearing, and panel lock reset.

Matching Adjustment

Matching Fundamentals and Adjustment Procedure

Explains basic matching circuits and guides users on adjusting variable capacitors.

Internal Coil and Capacitor Adjustments

Covers internal adjustments to coils, taps, and adding fixed capacitors for matching.

Power Derating Tables

Provides derating reference values for MBX models under various load conditions.

System Maintenance

RF Generator Maintenance & Inspection

Details recommended periodic replacement parts and inspection procedures for RF generators.

Matching Box Maintenance & Inspection

Lists recommended periodic replacement parts and overhaul intervals for matching boxes.

Troubleshooting

RF Generator Troubleshooting

Provides a list of common RF generator problems and their potential causes and solutions.

Matching Box Troubleshooting

Lists common matching box problems, their causes, and corrective actions.

Reference Materials

System Reference Documents

Lists documents and drawings provided as references for the system.

Ulvac RFP-N Specifications

General IconGeneral
BrandUlvac
ModelRFP-N
CategoryPower Supply
LanguageEnglish

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