Ulvac RFP-N - RF Generator Installation Environment

RF POWER SUPPLY and MATCHINGBOX
3. Setup
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3-2-2. RF Generator installation environment
 Ambient temperature of 10°C to 40°C when operating (RF-ON).
 Install so that the top panel is facing up in a location with good ventilation that avoids direct
sunlight, heat, dust, vibrations, and humidity.
 An atmosphere that does not contain corrosive gas.
 Use at an altitude of 2000 m or lower.
 Good air flow to the front and back.
 Create a space of 5 cm in the front and 10 cm in the back. If installed in a cabinet, use
perforated panels for ventilation in the front and back, and create a structure for the back that
does not trap heat. For methods other than the one listed above, create a structure that can
move air in and out of the structure in the amount of the fan air volume, or a higher amount,
listed in the RF Generator individual specifications.
 Always use a rack with supports 3 mm or thicker to mount the RF Generator in a standard
rack.
 The front panel only functions to prevent the RF Generator from falling out of the rack.
 Avoid installing the RF Generator in a location with an uneven floor surface.
 If the temperature error occurs frequently, check if the ambient temperature and air flow are
appropriate.
 Install indoors.