Ulvac RFP-N - MBX-1350 N Derating Reference Values

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
82
6-3-3. MBX-1350N derating reference values
Table 6-21 MBX-1350N - 1 tap
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
90% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
80% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
70% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
60% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
50% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
40% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
30% 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 450
20% 5000 5000 5000 5000 5000 5000 3600 2200 1300 700 400
10% 5000 5000 5000 5000 5000 3050 1850 1100 650 350 200
00% 5000 5000 5000 3850 2300 1400 850 500 300 150 100
TUNE
MATCH
MBX-1350N-(1T)
Table 6-22 MBX-1350N - 2 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
90% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
80% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
70% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
60% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
50% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
40% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
30% 5000 5000 5000 5000 5000 5000 5000 4150 2400 1300 700
20% 5000 5000 5000 5000 5000 5000 5000 3900 2400 1300 700
10% 5000 5000 5000 5000 5000 4450 2800 1800 1100 700 450
00% 5000 5000 5000 4850 2950 1850 1150 700 450 300 200
TUNE
MATCH
MBX-1350N-(2T)
Table 6-23 MBX-1350N - 3 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
90% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
80% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
70% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
60% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
50% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
40% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
30% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
20% 5000 5000 5000 5000 5000 5000 5000 4650 2750 1600 900
10% 5000 5000 5000 5000 5000 5000 5000 3850 2500 1600 900
00% 5000 5000 5000 5000 4450 2850 1850 1200 800 550 400
TUNE
MATCH
MBX-1350N-(3T)
Table 6-24 MBX-1350N - 4 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
90% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
80% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
70% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
60% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
50% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
40% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
30% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
20% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
10% 5000 5000 5000 5000 5000 5000 5000 4150 2500 1550 1000
00% 5000 5000 5000 5000 5000 5000 3400 2300 1500 1050 800
TUNE
MATCH
MBX-1350N-(4T)